Expanded benchtop plasma cleaner with a larger chamber for batch processing and larger substrates, designed for microfluidics surface preparation: PDMS activation, improved wettability, and PDMS-glass bonding. Ideal for routine chip fabrication and higher-throughput lab workflows.
General
Higher-capacity plasma activation for microfluidics
The Harrick Plasma Expanded Plasma Cleaner is a larger tabletop plasma instrument with increased capacity for surface cleaning and activation. It is well-suited to microfluidics workflows such as PDMS activation, PDMS-glass bonding, wettability tuning, channel conditioning, and improved adhesion for coatings or biomolecule immobilization. Plasma treatment increases surface energy and removes organic contaminants to support consistent bonding and reproducible device performance.
Features and Benefits
- Large chamber capacity: includes a 150 mm diameter × 165 mm length (6" x 6.5") Pyrex chamber for larger samples and batch processing.
- Microfluidics-ready activation: reliable PDMS-glass bonding and stable hydrophilization for channel wetting.
- Adjustable RF power: Low, Medium, High settings with up to 30 W max RF power for flexible process tuning.
- Convenient operation: hinged door with viewing window for daily lab use.
- Built-in gas handling: metering valve and 3-way valve for qualitative control of gas flow, pressure, venting, and isolation.
Typical microfluidics workflow
- Load PDMS and glass (or polymer substrates) into the chamber
- Evacuate chamber to process pressure using an external vacuum pump
- Plasma activation (air, O2, N2, Ar depending on process)
- Immediate bonding (PDMS-glass) or surface conditioning for wetting
- Surface preparation prior to coatings (PEG, ECM proteins) or functionalization
Variants and options
Choose the configuration that matches your lab power standard and level of process control.
- Power supply: 115 V or 230 V
- PlasmaFlo Gas Flow Mixer: optional, for quantitative control of up to two process gases and pressure monitoring
Vacuum pump
Choose the configuration that matches your lab power standard and level of process control.
Content
1x Expanded Plasma Cleaner main unit with Pyrex chamber
1x Power supply
1x User manual
Specifications
| |
PDC-001 (115V) |
PDC-002 (230V) |
| Chamber dimensions |
6" x 6.5" | 152.4 mm diameter × 165.1 mm (diameter x length), Pyrex |
| RF power settings |
Low, Medium, High |
| Maximum RF power |
30 W |
| Cooling |
Active fan cooling |
| Door |
Hinged door with viewing window |
| Gas inlet control |
1/8" NPT metering valve (qualitative control of gas flow and chamber pressure) |
| Gas/vent control |
1/8" NPT 3-way valve for introducing gas, venting, and isolating chamber |
| Vacuum pump switch |
Integral pump switch included |
Not available in CE model |
| Line power |
115 V |
230 V |
| Dimensions (H x W x D) |
11" x 18" x 9" | 279.4 mm × 457.2 mm × 228.6 mm |
| Weight |
37 lbs | 12 kg |
| Vacuum pump requirement |
Minimum 23 L/min, ultimate total pressure 200 mTorr or less |
Documentation
User Manual (PDF)
Quick Start Guide (PDF)
Expanded Plasma Cleaner datasheet (PDF)
