The Dry Oxygen Vacuum Pump PDC-OPD is the high-end, oil-free pump for oxygen service. It delivers higher pumping speed and deeper vacuum than the economy model, for faster pump-down and stable plasma processing in microfluidics, including PDMS activation and PDMS-glass bonding.
General
Harrick Plasma plasma cleaners require an external vacuum pump with a minimum pumping speed of 1.4 m3/h (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or lower.
This dry (oil-free) oxygen service pump is suitable for pumping concentrated oxygen as well as nonreactive or inert gases (air, N2, Ar). Because it uses no hydrocarbon oil, it avoids the safety risk associated with oxygen and hydrocarbon pump oil.
Compared to the economy dry oxygen pump, the PDC-OPD provides higher pumping speed and lower ultimate pressure, which can help reduce pump-down time and improve process consistency.
The pump kit includes everything needed to connect and operate safely:
- Pump inlet kit: hose, hose clamps, hose adaptor, centering ring and swing clamp (to connect the plasma cleaner to the pump inlet)
- Pump outlet kit: adaptor, centering ring, connectors and 9 ft. hose
Content
1x PDC-OPD (115 V) dry oxygen vacuum pump or 1x PDC-OPD-2 (230 V) dry oxygen vacuum pump
1x Inlet connection kit with hose, hose clamps, hose adaptor, centering ring, and swing clamp
1x Outlet connection kit with adaptor, centering ring, connectors and 9 ft. hose
Specifications
| |
PDC-OPD |
PDC-OPD-2 |
| Compatible gases |
Non-corrosive, non-explosive, non-particulate-forming |
| Pump Rate Max (50Hz) |
103 L/min | 6.2 m3/h |
| Pump Rate Max (60Hz) |
103 L/min | 6.2 m3/h |
| Final Pressure |
0.02 mbar | 15 mTorr (gas ballast closed)
0.05 mbar | 38 mTorr (gas ballast open) |
| Noise Level (at 3ft) |
52 dB(A) |
| Dimensions (l x w x h) |
305 mm × 432 mm × 279 mm | 12" x 17" x 11" |
| Weight |
26 kg | 58 lbs |
| Connection Diameter (Inlet/Outlet) |
NW25 KF flange / NW25 KF flange |
| AC Supply Frequency |
60Hz |
50-60Hz |
| Pressure Supply Voltage |
115 V |
230 V |
Documentation
Datasheet
Operating instructions
