The Basic Oil Vacuum Pump PDC-VPE meets the requirements for use with plasma cleaners. Ideal for reliable plasma cleaning and surface activation in microfluidics, including PDMS activation and PDMS-glass bonding.
General
Harrick Plasma plasma cleaners require an external vacuum pump with a minimum pumping speed of 1.4 m³/h (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or lower. This pump meets these requirements and is well suited for reliable plasma cleaning performance.
It is suitable only for nonreactive or inert gases such as air, N2, or Ar.
These oil-based pumps are not recommended for oxygen service; for oxygen processes, please use an oxygen-compatible dry pump.
The pump kit includes everything needed to connect and operate safely:
- Pump inlet kit: check valve, hose, hose clamps, and hose adaptor (to connect the plasma cleaner to the pump inlet)
- Pump outlet kit: oil mist filter to reduce oil vapor at the exhaust
Content
1x PDC-VPE(-2) basic oil vacuum pump
1x Inlet connection kit with check valve, hose, hose clamps, and hose adaptor
1x Outlet connection kit with oil mist filter
Specifications
| Pump Rate Max (50/60Hz) |
5.1 m3/h - 81 l/min |
| Final Pressure |
0.01 mbar | 7.5 mTorr |
| Gas Ballast |
Yes |
| Final Pressure (with Gas Ballast) |
0.2 mbar | 150 mTorr |
| Noise Level (at 3ft) |
54 dB(A) |
| Dimensions (l x w x h) |
250 x 140 x 360 mm | 9.75" x 5.5" x 14" |
| Weight |
12 kg | 27 lbs |
| Connection Diameter (Inlet/Outlet) |
1/4" Female BSPP / 1/2” Female BSPP |
| AC Supply Frequency |
50-60 Hz |
| Pressure Supply Voltage |
115 V or 230 V |
Documentation
Datasheet
Operating instructions
