Wafer Handling Vacuum Wand

The WHS Vacuum Wand systems provide cleanroom-safe wafer and device handling solutions, available in corded and cordless configurations for flexible laboratory and semiconductor applications.

General

The WHS Vacuum Wand range is designed for safe and repeatable wafer handling in cleanroom, laboratory, and semiconductor environments. Available in corded and cordless configurations, the systems support wafer transfer, small device handling, wafer rescue, and manual sorting applications.

The corded WHS-V2 Vacuum Wand Sets are supplied as complete preassembled systems including vacuum tip, handle, coil cord, and holder for immediate use. The cordless WHS-V6 Portable Vacuum Wand provides fully portable handling without external vacuum lines, offering increased mobility and convenience for flexible process environments.

Both systems use ESD-safe and cleanroom-compatible materials including antistatic polycarbonate and PEEK to provide reliable handling performance while minimizing contamination risk.

The standard configurations are optimized for 100 - 200 mm wafer handling, with additional wafer sizes, thin wafer configurations, compound wafer options, and small device handling solutions available upon request.

Features & Benefits

• Cleanroom compatible: ISO 3 (Class 1 FS209E) cleanliness rating for semiconductor and cleanroom applications.
• ESD-safe materials: Antistatic construction helps protect sensitive wafers and devices during handling.
• Corded and cordless options: Choose between traditional vacuum wand assemblies or fully portable battery-powered operation.
• Portable cordless operation: WHS-V6 cordless model eliminates vacuum lines for improved mobility and flexible handling.
• Long runtime: Replaceable lithium-ion battery provides more than 5 hours of continuous cordless operation.
• HEPA filtration: Integrated H14 HEPA filter captures 99.99% of 0.3 μm particles for improved contamination control.
• Complete ready-to-use systems: Corded sets include vacuum tip, handle, coil cord, and holder.
• Wide application compatibility: Suitable for wafer handling, thin wafers, compound wafers, and small device handling.

Applications

The WHS Vacuum Wand systems are suitable for cleanroom and semiconductor handling applications requiring safe and repeatable manual wafer transfer.

• Wafer handling and transfer
• Wafer rescue operations
• Manual sorting
• Small device handling
• Thin and compound wafer handling
• Laboratory and cleanroom processing
• Light production environments

Content

1x WHS Vacuum Wand System, corded or cordless version depending on selected model

Specifications

Documentation

Portable Vacuum Wand - Data Sheet

Vacuum Wand Sets - Data Sheet