A cutting-edge easy-to-use UV-LED masking system tailored for microfluidics and photolithography, offering unparalleled resolution down to 2 µm.
General
The UV-KUB 2 is the first UV-LED masking system available internationally, setting a new standard for precision and efficiency in photolithography. Available in 4" or 6" versions, this compact system is equipped with a high-performance LED-based optical head that delivers collimated and homogeneous illumination.
Its masking function ensures resolutions as fine as 2 µm, making it ideal for the fabrication of microfluidic devices, integrated optical circuits, and surface microstructuring.
Compatible with popular photoresists like AZ, Shipley, Kayaku SU-8, Kemlab Hare SQ, and K-CL series, the UV-KUB 2 is designed to excel in laboratory and clean-room environments.
Key Features & Benefits
- Unrivalled collimation performance: Achieve resolution down to 2µm with exceptional edge verticality.
- Versatile UV-LED exposure source: Operates in continuous or pulse mode, ensuring minimal thermal effects.
- Durable and low-maintenance: LED lifetime exceeds 10,000 hours.
- Compact and safe: Hermetic configuration with touchscreen control and closed exposure chamber for laboratory or clean-room use.
- Ease of use: Designed with a 5.7-inch touchscreen interface, the UV-KUB 2 ensures intuitive operation and minimal setup time.
- Application-ready: Perfect for creating microfluidic systems, microelectronics, photonics, and surface functionalization.
Content
- 1x UV-KUB 2 UV-LED Masking System for 4" or 6" wafers
- 1x Touchscreen control interface with stylus
- 1x Power supply (100V/240V)
Specifications
| Resolution |
2 µm |
| Wavelength |
365 nm ± 5 nm |
| Power density |
35 mW/cm² ± 10% |
| Max wafer size |
4" or 6" |
| Max total thickness |
2 mm |
| Contact |
Hard (physical) or Soft (proximity) |
| Substrate warm-up |
< 1°C during exposure |
| Exposure cycle |
1 second to 1 hour |
| Programmable cycles |
Up to 10 |
| Dimensions |
260 x 260 x 260 mm |
| Weight |
8.2 kg (18 lbs) |
| Touchscreen |
5.7-inch color interface with stylus |
| Power supply |
100V/240V - 50Hz/60Hz |
| Power consumption |
180 W |
Documentation
